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Rapid Thermal Processor (RTP)

MANUFACTURER Surface Science Iintegration
MODEL 150
CONTACT 1 Steve Etienne
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SITE Bloomsbury Campus

Description

The SSI Inc Solaris 150 Rapid Thermal Processing System (RTP) is a proven, “state of the art” versatile tool for Silicide formation, metal Alloys Group III Nitrides Reflow: BPSG, PSG contact anneal, Ferroelectrics, Implant anneal, HBT & MESFET Solar Cells, Implant monitoring Thermal donor, Si-Ge and LEDs.

Specification

The Solaris 150 is a manually loaded Rapid Thermal Processing System. Capable of processing silicon, III-V and other substrates up to 150mm diameter. The maximum temperature of operation is 1100 C.

Item ID #2455.

Last Updated: 23rd October, 2014

Rapid Thermal Processor (RTP)

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