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Quintel Mask Aligner

MANUFACTURER Quintel
MODEL Q4000-6 Mask Aligner

London Centre for Nanotechnology

TRAINING No special training required.
CONTACT 1 Steve Etienne
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SITE Bloomsbury Campus

Description

For whole wafers larger than 2" dimater up to 150 mm diameter

Mask Sizes from 4" square x 0.060", up to 7" square x 0.090".

Infra Red back side alignment.

Soft and vacuum contact modes

UV300 Optics for 365nm sensitive Photoresists

Specification

For whole wafers larger than 2" dimater up to 150 mm diameter

Mask Sizes from 4" square x 0.060", up to 7" square x 0.090".

Infra Red back side alignment.

Soft and vacuum contact modes

UV300 Optics for 365nm sensitive Photoresists

Item ID #2423.

Last Updated: 17th January, 2014

Quintel Mask Aligner

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