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Electron Beam Lithography

MANUFACTURER Raith
MODEL Raith 150

London Centre for Nanotechnology

CONTACT 1 Suguo Huo
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SITE Bloomsbury Campus

Description

"Electron Beam Lithography

Raith 150-TWO Electron Beam Lithography Resolution 20nm Electron Beam resist processes 495 & 950 PMMA Sample size from 10 x10mm up to 150mm diameter"

Item ID #2461.

Last Updated: 17th January, 2014

Electron Beam Lithography

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