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Hitech Furnace

MANUFACTURER Hitech
MODEL Hitech Furnace

London Centre for Nanotechnology

TRAINING No special training required.
CONTACT 1 Steve Etienne
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SITE Bloomsbury Campus

Description

Wafer Furnace with quartzware boat for 4" or 3" diameter wafers. Maximum load is 25 wafers. Maximum temperature is 1100ÂșC.

Gases available are: O2, N2 and 5%H2/N2

Item ID #2457.

Last Updated: 17th January, 2014

Hitech Furnace

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