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Plasma Enhanced CVD

MANUFACTURER SPTS Ltd
MODEL Plasma Enhanced CVD

London Centre for Nanotechnology

TRAINING No special training required.
CONTACT 1 Steve Etienne
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SITE Bloomsbury Campus

Description

STS Multiplex PECVD, Dual frequency RF, + loadlock, samples up to 6” diameter

Gases: NH3, N2O, O2, SiH4, CF4+ O2, N2.

Deposition of silicon oxide, silicon nitride, and stress controlled siliocn oxynitride.`

Specification

STS Multiplex PECVD, Dual frequency RF, + loadlock, samples up to 6” diameter

Gases: NH3, N2O, O2, SiH4, CF4+ O2, N2.

Deposition of silicon oxide, silicon nitride, and stress controlled siliocn oxynitride.`

Item ID #2427.

Last Updated: 17th January, 2014

Plasma Enhanced CVD

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